Managing Heat Loss Around a Wafer Heater for More Stable Operation

https://electric-heat-insights.focalledger.com/posts/silicone-heater-installation-tips-for-reliable-thermal-performance

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result